Simulation and characterization of encapsulated pressure sensors
Fassbender, Holger; Thiel, Wiebke; Mokwa, Wilfried
Amsterdam [u.a.] : Elsevier (2009)
Contribution to a book, Contribution to a conference proceedings
In: Proceedings of the Eurosensors XXIII conference : Ed. by Juergen Brugger ...
Page(s)/Article-Nr.: 843-846
Institutions
- Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
Identifier
- DOI: 10.1016/j.proche.2009.07.210
- RWTH PUBLICATIONS: RWTH-CONV-172689