Comparative Study of Surface Activation Steps for Thermally Grown Oxide Interface and Optimal Silanization

Murugan, Divagar; Tintelott, Marcel J.; Amiri, Hesam; Kasavetov, Martin; Besedin, Denis; Ingebrandt, Sven; Vu, Xuan Thang; Pachauri, Vivek (Corresponding author)

Weinheim : Wiley-VCH (2023)
Journal Article

In: Physica status solidi / A
Page(s)/Article-Nr.: 2300294

Institutions

• Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]