Rapid thermal annealing and reduction process monitoring of graphene oxide thin film on chip

Amiri, Hesam; Nikookhesal, Aidin; Murugan, Divagar; Scholz, Stefan; Frentzen, Michael; Cao, Yuan; Vu, Xuan Thang; Schnakenberg, Uwe; Sai, Raghavendra; Narayanan, Madaboosi; Knoch, Joachim; Ingebrandt, Sven; Pachauri, Vivek

Neuerscheinung. - Berlin : VDE Verlag (2022)
Contribution to a book, Contribution to a conference proceedings

In: GMM-Fb. 105: Mikro-Nano-Integration : Beitr├Ąge des 9. GMM-Workshops 21. - 22.11.2022 in Aachen

Institutions

  • Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]

Identifier