In-plane thermal property measurements of Parylene C thin films with an RTD sensor array on a SiNx membrane

Jiang, Felix; Schaller, Laura; Ryu, Meguya; Morikawa, Junko; Ingebrandt, Sven; Vu, Xuan Thang

Contribution to a conference proceedings

In: [9. GMM-Fachtagung "Mikro-Nano-Integration", MNI, 2022-11-21 - 2022-11-22, Aachen, Germany]


  • Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]