Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays

Tintelott, Marcel; Pachauri, Vivek; Ingebrandt, Sven; Vu, Xuan Thang (Corresponding author)

Basel : MDPI (2021)
Contribution to a book, Journal Article

In: Sensors
Volume: 21
Issue: 15
Page(s)/Article-Nr.: 5153

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
• Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]