Silane Deposition via Gas-Phase Evaporation and High-Resolution Surface Characterization of the Ultrathin Siloxane Coatings

• Silanabscheidung durch Gasphasenverdampfung und hochauflösende Oberflächencharakterisierung der ultradünnen Siloxanbeschichtungen

Munief, Walid-Madhat; Heib, Florian; Hempel, Felix; Lu, Xiaoling; Schwartz, Miriam; Pachauri, Vivek; Hempelmann, Rolf; Schmitt, Michael; Ingebrandt, Sven (Corresponding author)

Washington, DC : ACS Publ. (2018)
Journal Article

In: Langmuir / American Chemical Society
Volume: 34
Issue: 35
Page(s)/Article-Nr.: 10217-10229

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
• Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]