Wafer-Scale Nanoimprint Lithography Process Towards Complementary Silicon Nanowire Field-Effect Transistors for Biosensor Applications

Müller, Achim; Vu, Xuan Thang; Pachauri, Vivek; Francis, Laurent A.; Flandre, Denis; Ingebrandt, Sven

Weinheim : Wiley-VCH (2018)
Contribution to a book, Journal Article

In: Physica status solidi / A
Volume: 215
Issue: 15
Page(s)/Article-Nr.: 1800234

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]