Multi-layer dry films

Schnakenberg, Uwe (Corresponding author)

1st edition. - Zwickau (2017)
Contribution to a book

In: Resist systems and processing of high aspect ratio micro- and nanostructures : SU-8 and its variations - a story of success : educational book : a short story of a universal MEMS material / editors: Grimm, Grützner, Löchel

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]