A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes

Walk, C.; Görtz, M.; Mokwa, Wilfried; Vogt, H.

Berlin : VDE VERLAG (2017)
Contribution to a book, Contribution to a conference proceedings

In: MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme" : proceedings: 23.-25. Oktober 2017 in München, INFINITY Unterschleißheim / Organisatoren: VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik (GMM); VDI/VDE Innovation + Technik GmbH (VDI/VDE-IT)

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]