Development of a post-CMOS compatible nanoporous Al2O3 thin film layer

Dogan, O.; Buschhausen, Armin; Walk, C.; Mokwa, Wilfried; Vogt, H.

(2017)
Contribution to a conference proceedings

In: [International Conference on Nanomaterials and Biomaterials, ICNB 2017, 2017-12-11 - 2017-12-13, Amsterdam, Netherlands]

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]