Iridium oxide deposited by pulsed DC-sputtering for stimulation electrodes

van Ooyen, André; Topalov, Georgi; Schnakenberg, Uwe

Aachen : Inst. of Materials in Electrical Engineering 1 (2008)
Contribution to a book, Contribution to a conference proceedings

In: Technical digest / MME 2008, 19th MicroMechanics Europe Workshop : September 28 - 30, 2008, Aachen, Germany / [Uwe Schnakenberg, chairman]
Page(s)/Article-Nr.: 117-120

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]