Approach for reducing the interconnection height between differentchips in pressure sensor systems

Fischer, Ronald (Corresponding author); Müntjes, Jutta A. (Collaboration author); Mokwa, Wilfried

Auerbach, Germany : Verlag Wissenschaftliche Scripten (2016)
Contribution to a book, Contribution to a conference proceedings

In: Smart Systems Integration : International Conference and Exhibition on Integration Issues of Miniaturized Systems ; Munich, Germany, 9-10 March 2016 / Prof. Dr. T. Gessner (ed., Fraunhofer Institute for Electronic Nano Systems ENAS, Germany) ; organized by: Mesago Messe Frankfurt GmbH, Germany ; co-organizer: Fraunhofer Institute for Electronic Nano Systems ENAS, Germany, Fraunhofer Institute for Reliability and Microintegration IZM, Germany
Page(s)/Article-Nr.: 380-383

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]