Application oriented nano-patterning methods based on the liquid transfer imprint lithography

Kim, Jung Wuk; Kurz, Heinrich (Thesis advisor); Mokwa, Wilfried (Thesis advisor)

1. Aufl.. - M√ľnchen : Hut (2015)
Dissertation / PhD Thesis

In: Ingenieurwissenschaften
Page(s)/Article-Nr.: IV, 139 S. : Ill., graph. Darst.

Zugl.: Aachen, Techn. Hochsch., Diss., 2014

Institutions

  • Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]

Identifier