Low-cost technology for photolithography on convex surfaces

Franitza, Florian; Kosubek, Michael; Kremers, Tom; Rockenbach, Alexander; Mokwa, Wilfried

Aachen : Apprimus Wissenschaftsverlag (2014)
Contribution to a book, Contribution to a conference proceedings

In: Smart Systems Integration 2014 / Hrsg.: Thomas Gessner
Page(s)/Article-Nr.: 471-474

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]