Temperature stabilized silicon based Surface-Acoustic-Wave gas sensors for the detection of solvent vapours

Bender, Stefan; Mokwa, Wilfried

Bellingham, Wash : SPIE (1998)
Contribution to a book, Contribution to a conference proceedings

In: Chemical microsensors and applications / [Conference on Chemical Microsensors and Applications, held as part of the SPIE International Symposium on Industrial and Environmental Monitors and Biosensors, 4 - 5 November 1998, Boston, Massachusetts]. Sponsored and publ. by SPIE, the International Society for Optical Engineering. Stephanus Büttgenbach, chair/ed
Page(s)/Article-Nr.: 123-130

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]