Grey-tone lithography and dry etching technique for the fabrication of integrated spot size converters

Ullerich, S.; Steingrüber, R.; Umbach, A.

Amsterdam : Elsevier [u.a.] (1999)
Contribution to a conference proceedings, Journal Article

In: Microelectronic engineering
Volume: 46
Issue: 1/4
Page(s)/Article-Nr.: 303-306

Institutions

  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]

Identifier