From submicron stand-alone capacitor testing to fast pulse switching experiments and testing of fully integrated ferroelectric 1T-1C test structures

Schmitz, T.; Tiedke, S.; Ellerkmann, U.

London [u.a.] : Tayler & Francis (2004)
Contribution to a conference proceedings, Journal Article

In: Integrated ferroelectrics
Volume: 67
Page(s)/Article-Nr.: 125-131

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
• Chair of Materials of Electrical Engineering II and Institute of Materials of Electrical Engineering [611610]