Platform for Temporary Testing of Hybrid Microsystems at High Frequencies

Spanier, Gerd; Krüger, Clemens; Schnakenberg, Uwe; Mokwa, Wilfried

New York, NY : IEEE (2007)
Journal Article

In: Journal of microelectromechanical systems
Volume: 16
Issue: 6
Page(s)/Article-Nr.: 1367-1376

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]