Integration of piezoelectric PZT thin films with internal electrodes into an actuator structure for MEMS applications

Hoffmann, M.; Leuerer, T.; Liedtke, R.; Böttger, Ulrich; Mokwa, Wilfried; Waser, Rainer

Philadelphia, Pa : Gordon and Breach Science Publ. (2002)
Journal Article

In: Integrated ferroelectrics
Volume: 50
Issue: 1
Page(s)/Article-Nr.: 21-32

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
• Chair of Materials of Electrical Engineering II and Institute of Materials of Electrical Engineering [611610]