Micro-springs for temporary chip connections
Krüger, Clemens; Bartelink, D. J.; Fritz, Thomas Michael; Leuerer, Timm; Mokwa, Wilfried; Schnakenberg, Uwe
Amsterdam [u.a.] : Elsevier (2000)
Journal Article
In: Sensors and actuators / A, Physical
Volume: 85
Issue: 1/3
Page(s)/Article-Nr.: 371-376
Institutions
- Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
Identifier
- DOI: 10.1016/S0924-4247(00)00401-5
- RWTH PUBLICATIONS: RWTH-CONV-032958