Basic investigations on a piezoelectric bending actuator for micro-electro-mechanical applications

Küppers, H.; Hoffmann, M.; Leuerer, Timm; Schneller, Theodor; Böttger, Ulrich; Waser, Rainer; Mokwa, Wilfried; Schnakenberg, Uwe

Philadelphia, Pa : Gordon and Breach Science Publ. (2001)
Journal Article

In: Integrated ferroelectrics
Volume: 35
Issue: 1/4
Page(s)/Article-Nr.: 269-281

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
• Chair of Materials of Electrical Engineering II and Institute of Materials of Electrical Engineering [611610]