Capacitive pressure sensor with monolithically integrated CMOS readout circuit for high temperature applications

Kasten, Klaus; Kordas, Norbert; Kappert, Holger; Mokwa, Wilfried

Amsterdam [u.a.] : Elsevier (2002)
Journal Article

In: Sensors and actuators / A, Physical
Volume: 97/98
Page(s)/Article-Nr.: 83-87

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]