Theoretical calculations and performance results of a PZT thin film actuator

Hoffmann, Marcus; Küppers, Hartmut Paul; Schneller, Theodor; Böttger, Ulrich; Schnakenberg, Uwe; Mokwa, Wilfried; Waser, Rainer

New York, NY : IEEE (2003)
Journal Article

In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control : UFFC
Volume: 50
Issue: 10
Page(s)/Article-Nr.: 1240-1246

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]