CMOS-compatible capacitive high temperature pressure sensors

Kasten, Klaus; Amelung, Jörg; Mokwa, Wilfried

Amsterdam [u.a.] : Elsevier (2000)
Journal Article

In: Sensors and actuators / A, Physical
Volume: 85
Issue: 1/3
Page(s)/Article-Nr.: 147-152

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]