PZT thin films for piezoelectric microactuator applications

Küppers, H.; Leuerer, Timm; Schnakenberg, Uwe; Mokwa, Wilfried; Hoffmann, M.; Schneller, Theodor; Böttger, Ulrich; Waser, Rainer

Amsterdam [u.a.] : Elsevier (2002)
Journal Article

In: Sensors and actuators / A, Physical
Volume: 97/98
Page(s)/Article-Nr.: 680-684

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
• Chair of Materials of Electrical Engineering II and Institute of Materials of Electrical Engineering [611610]