RF-sputtering of iridium oxide to be used as stimulation material in functional medical implants

Wessling, Börge; Mokwa, Wilfried; Schnakenberg, Uwe

Bristol : IOP Publ. (2006)
Journal Article

In: Journal of micromechanics and microengineering
Volume: 16
Issue: 6
Page(s)/Article-Nr.: S142-S148

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]