A novel process for the preparation of thick porous silicon layers with very high porosity

Feyh, A.; Laermer, F.; Kronmüller, S.; Mokwa, Wilfried

Berlin : Wiley-VCH (2005)
Journal Article

In: Physica status solidi / A, Applications and materials science
Volume: 202
Issue: 8
Page(s)/Article-Nr.: 1597-1601

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]