NiW-micro springs for chip connection

Kr├╝ger, C.; Mokwa, Wilfried; Schnakenberg, Uwe

Piscataway, NJ : IEEE Operations Center (2004)
Contribution to a book, Contribution to a conference proceedings

In: Proceedings / MEMS 2004, IEEE the 17th International Conference on Micro Electro Mechanical Systems : Maastricht Exhibition and Congress Centre, Maastricht, the Netherlands / [sponsored by IEEE and the Robotics and Automation Society]
Page(s)/Article-Nr.: 117-120


  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]