A new concept and first development results of a PZT thin film actuator

Hoffmann, Marcus; Küppers, Hartmut Paul; Schneller, Theodor; Böttger, Ulrich; Schnakenberg, Uwe; Mokwa, Wilfried; Waser, Rainer

Piscataway, NJ : IEEE Operations Center (2001)
Contribution to a book, Contribution to a conference proceedings

In: Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics, ISAF 2000 : Honolulu, Hawaii, U.S.A., July 21 - August 2, 2000 / Institute of Electrical and Electronics Engineers, Ultrasonics, Ferroelectrics, and Frequency Control Society. Ed.: S. K. Streiffer ... - Vol. 1
Page(s)/Article-Nr.: 512-524

Institutions

  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
  • Chair of Materials of Electrical Engineering II and Institute of Materials of Electrical Engineering [611610]

Identifier