[Buchbeitrag, Beitrag zu einem Tagungsband]
Iridium sputtered at varying pressures and target-substratedistances evaluated for use as stimulation electrode material
In: 2006 28th Annual International Conference of the IEEE Engineering in Medicine and Biology Society : New York, NY, 30 August - 3 September 2006. - Vols 1-15, 474-477, 2006
[DOI: 10.1109/IEMBS.2006.260541]

Wessling, Börge
van Ooyen, André
Mokwa, Wilfried
Schnakenberg, Uwe

[Beitrag zu einem Tagungsband, Fachzeitschriftenartikel]
Production processes and applications for the passive alignment of microcomponents
In: Microsystem technologies, 12 (5), 611-615, 2006
[DOI: 10.1007/s00542-006-0094-2]

Brecher, Christian
Lange, Sven Carsten
Peschke, Christian
Weinzierl, Martin
Spanier, G.
et al.

[Fachzeitschriftenartikel]
Deposition of sputtered iridium oxide : influence of oxygen flow in the reactor on the film properties
In: Applied surface science, 253 (4), 1964-1969, 2006
[DOI: 10.1016/j.apsusc.2006.03.073]

Slavcheva, Evelina
Schnakenberg, Uwe
Mokwa, Wilfried

[Beitrag zu einem Tagungsband, Fachzeitschriftenartikel]
Microsystem technologies for an epiretinal implant
In: Biomedicine & pharmacotherapy, 60 (8), 475-476, 2006
[DOI: 10.1016/j.biopha.2006.07.033]

Mokwa, Wilfried

[Fachzeitschriftenartikel]
Long-term stability of PDMS-based microfluidic systems used for biocatalytic reactions
In: Journal of micromechanics and microengineering, 16 (11), 2425-2428, 2006
[DOI: 10.1088/0960-1317/16/11/025]

Klammer, Ingo
Hofmann, Mirko
Buchenauer, Andreas
Mokwa, Wilfried
Schnakenberg, Uwe

[Beitrag zu einem Tagungsband, Fachzeitschriftenartikel]
HF-contact elements for testing and multi chip module applications
In: Microsystem technologies, 12 (10/11), 1015-1019, 2006
[DOI: 10.1007/s00542-006-0133-z]

Spanier, Gerd
Slavcheva, Evelina
Mokwa, Wilfried

[Fachzeitschriftenartikel]
RF-sputtering of iridium oxide to be used as stimulation material in functional medical implants
In: Journal of micromechanics and microengineering, 16 (6), S142-S148, 2006
[DOI: 10.1088/0960-1317/16/6/S21]

Wessling, Börge
Mokwa, Wilfried
Schnakenberg, Uwe

[Buchbeitrag, Beitrag zu einem Tagungsband]
Pressure sensor capsule to control the treatmnent of abdominal aorta aneurisms
In: Transducers '05 : the 13th International Conference on Solid-State Sensors, Actuators and Microsystems ; Seoul, Korea, [June 5 - 9, 2005] ; digest of technical papers / sponsored by Korean Sensors Society. Technical co-sponsors: IEEE Electron Devices Society ..., 1656-1659, 2005
[DOI: 10.1109/SENSOR.2005.1497407]

Schlierf, Roland Gottfried
Görtz, Michael
Schmitz-Rode, Thomas
Mokwa, Wilfried
Schnakenberg, Uwe
et al.

[Buchbeitrag, Beitrag zu einem Tagungsband]
RF-Sputtering of iridium oxide to be used as stimulation material in functional medical implants
In: 16th MME, Micromechanics Europe Workshop : 4 - 6 September 2005, Göteborg, Sweden / [Peter Enoksson, chairman MME 05], 199-203, 2005

Wessling, Börge
Schnakenberg, Uwe (Corresponding author)

[Buchbeitrag, Beitrag zu einem Tagungsband]
Production and long-term stability of polydimethylsiloxane-based microfluidic systems used for biocatalytic reactions
In: 16th MME, Micromechanics Europe Workshop : 4 - 6 September 2005, Göteborg, Sweden / Enoksson, Peter, 346-349, 2005

Klammer, Ingo
Hofmann, Mirko
Mokwa, Wilfried
Schnakenberg, Uwe (Corresponding author)

[Buchbeitrag, Beitrag zu einem Tagungsband]
Galvanically decoupled impedance spectroscopy for biological high-throughput-screening in microtiter plates
In: 2005 IEEE sensors : 30 October to 3 November 2005, Irvine, CA ; [the 4th IEEE Conference on Sensors ; Fourth IEEE Sensors 2005 Conference]. - Vol. 2, 1157-1160, 2005
[DOI: 10.1109/ICSENS.2005.1597910]

Hofmann, M. C.
Schlierf, R.
Mokwa, Wilfried
Schnakenberg, Uwe
Kensy, F.
et al.

[Fachzeitschriftenartikel]
Mikro- und Nanosystemtechnik - medizintechnologische Aspekte am Beispiel eines Blasendrucksensors
In: Chirurgische Gastroenterologie, 21 (2), 38-42, 2005
[DOI: 10.1159/000089346]

Clasbrummel, B.
Muhr, G.
Jettkant, B.
Dehm, J.
Schlierf, R.
et al.

[Fachzeitschriftenartikel]
Electrodeposition and properties of NiW films for MEMS application
In: Electrochimica acta, 50 (28), 5573-5580, 2005
[DOI: 10.1016/j.electacta.2005.03.059]

Slavcheva, Evelina
Mokwa, Wilfried
Schnakenberg, Uwe

[Fachzeitschriftenartikel]
Epiretinale Sehprothesen
In: Der Ophthalmologe : Zeitschrift der Deutschen Ophthalmologischen Gesellschaft, 102 (10), 933-940, 2005
[DOI: 10.1007/s00347-005-1250-2]

Walter, Peter
Mokwa, Wilfried

[Fachzeitschriftenartikel]
A novel process for the preparation of thick porous silicon layers with very high porosity
In: Physica status solidi / A, Applications and materials science, 202 (8), 1597-1601, 2005
[DOI: 10.1002/pssa.200461195]

Feyh, A.
Laermer, F.
Kronmüller, S.
Mokwa, Wilfried

[Beitrag zu einem Tagungsband, Fachzeitschriftenartikel]
Production processes for a flexible retina implant (Eurosensors XVIII, Session C6.6)
In: Sensors and actuators / A, Physical, 123/124, 172-178, 2005
[DOI: 10.1016/j.sna.2005.03.061]

Hungar, Kaspar
Görtz, Michael
Slavcheva, Evelina
Spanier, Gerd
Weidig, Christopher
et al.

[Fachzeitschriftenartikel]
Transponder-based sensor for monitoring electrical properties of biological cell solutions
In: Journal of bioscience and bioengineering, 100 (2), 172-177, 2005
[DOI: 10.1263/jbb.100.172]

Hofmann, Mirko
Kensy, Frank Torsten
Büchs, Jochen
Mokwa, Wilfried
Schnakenberg, Uwe

[Beitrag zu einem Tagungsband, Fachzeitschriftenartikel]
Galvanic decoupled sensor for monitoring biomass concentration during fermentation processes
In: Sensors and actuators / A, Physical, 111/112, 370-375, 2005
[DOI: 10.1016/j.snb.2005.03.037]

Hofmann, M. C.
Ellersiek, Dennis
Kensy, Frank Torsten
Büchs, Jochen
Mokwa, Wilfried
et al.

[Buchbeitrag, Beitrag zu einem Tagungsband]
NiW-micro springs for chip connection
In: Proceedings / MEMS 2004, IEEE the 17th International Conference on Micro Electro Mechanical Systems : Maastricht Exhibition and Congress Centre, Maastricht, the Netherlands / [sponsored by IEEE and the Robotics and Automation Society], 117-120, 2004
[DOI: 10.1109/MEMS.2004.1290536]

Krüger, C.
Mokwa, Wilfried
Schnakenberg, Uwe

[Buchbeitrag, Beitrag zu einem Tagungsband]
Performance studies on inversion channels of nMOSFETs under extreme mechanical load
In: Proceedings of IEEE sensors 2004 : [IEEE Sensors 2004 Conference] ; October 24 - 27, Vienna University of Technology, Vienna, Austria / ed. by D. Rocha ..., 1585-1588, 2004
[DOI: 10.1109/ICSENS.2004.1426494]

Kizilirmak, Gökhan
Mokwa, Wilfried
Schnakenberg, Uwe

[Beitrag zu einem Tagungsband, Fachzeitschriftenartikel]
From submicron stand-alone capacitor testing to fast pulse switching experiments and testing of fully integrated ferroelectric 1T-1C test structures
In: Integrated ferroelectrics, 67, 125-131, 2004
[DOI: 10.1080/10584580490898623]

Schmitz, T.
Tiedke, S.
Ellerkmann, U.

[Fachzeitschriftenartikel]
Sputtered iridium oxide films as charge injection material for functional electrostimulation
In: Journal of the Electrochemical Society : JES, 151 (7), E226-E237, 2004
[DOI: 10.1149/1.1747881]

Slavcheva, Evelina
Vitushinsky, R.
Mokwa, Wilfried
Schnakenberg, Uwe

[Beitrag zu einem Tagungsband, Fachzeitschriftenartikel]
Intravascular pressure monitoring system
In: Sensors and actuators / A, Physical, 110 (1/3), 61-67, 2004
[DOI: 10.1016/j.sna.2003.04.001]

Schnakenberg, Uwe
Krüger, Clemens
Pfeffer, Joachim-Georg
Mokwa, Wilfried
vom Bögel, Gerd
et al.

[Fachzeitschriftenartikel]
Planar coils with magnetic layers for optimized energy transfer in telemetric systems
In: Sensors and actuators / A, Physical, 116 (3), 410-416, 2004
[DOI: 10.1016/j.sna.2004.05.020]

Leuerer, Timm
Mokwa, Wilfried

[Beitrag zu einem Tagungsband, Fachzeitschriftenartikel]
MEM technologies for epiretinal stimulation of the retina
In: Journal of micromechanics and microengineering, 14.2004 (9), S12-S16, 2004
[DOI: 10.1088/0960-1317/14/9/002]

Mokwa, Wilfried

[Buchbeitrag, Beitrag zu einem Tagungsband]
Microsystem technologies for ophthalmological implants
In: Microfluidics, bioMEMS, and medical microsystems : 27 - 29 January 2003, San Jose, California, USA / sponsored and publ. by SPIE, the International Society for Optical Engineering. Holger Becker ..., chairs/ed., 1-7, 2003
[DOI: 10.1117/12.480773]

Mokwa, Wilfried

[Buchbeitrag, Beitrag zu einem Tagungsband]
Ophthalmic implants
In: Proceedings of IEEE sensors 2003 : Second IEEE International Conference on Sensors, October 22 - 24, 2003, Sheraton Centre Hotel, Toronto, Canada / sponsored by the IEEE Sensors Council. - Vol. 2, 980-986, 2003
[DOI: 10.1109/ICSENS.2003.1279089]

Mokwa, Wilfried

[Buchbeitrag, Beitrag zu einem Tagungsband]
Biocompatible assembling and packaging technology demonstrated by the integration of a micro sensor on a micro blood pump
In: Proceedings of IEEE sensors 2003 : Second IEEE International Conference on Sensors, October 22 - 24, 2003, Sheraton Centre Hotel, Toronto, Canada / sponsored by the IEEE Sensors Council. - Vol. 2, 991-995, 2003
[DOI: 10.1109/ICSENS.2003.1279091]

Spanier, G.
Eberhardt, W.
Ahrendt, D.
Oprea, M.
Zippmann, V.
et al.

[Fachzeitschriftenartikel]
Vascular capsule for telemetric monitoring of blood pressure
In: RöFo : Fortschritte auf dem Gebiet der Röntgenstrahlen und der bildgebenden Verfahren, 175 (2), 282-286, 2003
[DOI: 10.1055/s-2003-37232]

Schmitz-Rode, Thomas (Corresponding author)
Schnakenberg, Uwe
Pfeffer, J. G.
Piroth, W.
Vom Bögel, G.
et al.

[Fachzeitschriftenartikel]
Theoretical calculations and performance results of a PZT thin film actuator
In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control : UFFC, 50 (10), 1240-1246, 2003
[DOI: 10.1109/TUFFC.2003.1244739]

Hoffmann, Marcus
Küppers, Hartmut Paul
Schneller, Theodor
Böttger, Ulrich
Schnakenberg, Uwe
et al.

[Beitrag zu einem Tagungsband, Fachzeitschriftenartikel]
Investigations on temperature controlled monolithic integrated surface acoustic wave (SAW) gas sensors
In: Sensors and actuators / B, Chemical, 93.2003 (1/3), 164-168, 2003
[DOI: 10.1016/S0925-4005(03)00194-1]

Bender, S.
Dickert, F. L.
Mokwa, Wilfried
Pachatz, P.

[Beitrag zu einem Tagungsband, Fachzeitschriftenartikel]
Determination of Young's modulus of electroplated nickel
In: Electrochimica acta, 48.2003 (20/22 : Special issue), 3029-3035, 2003
[DOI: 10.1016/S0013-4686(03)00370-0]

Fritz, Thomas Michael
Griepentrog, M.
Mokwa, Wilfried
Schnakenberg, Uwe

[Beitrag zu einem Tagungsband]
Processing of high conductive yarns for signal transmission in smart textiles
In: Hightex - it's our future : Techtextil Symposium, 12th International Techtextil Symposium for Technical Textiles, Nonwovens and Textile Reinforced Materials, 7 - 10 April, 2003, Frankfurt am Main ; lectures/Vorträge / Messe Frankfurt, lecture no. 3.15, 2003

Schedukat, Nils
Gries, Thomas
Spanier, Gerd
Schnakenberg, Uwe
Mokwa, Wilfried

[Buchbeitrag, Beitrag zu einem Tagungsband]
Micro coils for improved power transfer in telemetry systems
In: Proceedings / 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology : May 2 - 4, 2002, Madison, Wisconsin, USA / co-ed.: André Dittmar .̤, 420-423, 2002
[DOI: 10.1109/MMB.2002.1002360]

Ullerich, S.
Mokwa, Wilfried
Schnakenberg, Uwe

[Fachzeitschriftenartikel]
Integration of piezoelectric PZT thin films with internal electrodes into an actuator structure for MEMS applications
In: Integrated ferroelectrics, 50 (1), 21-32, 2002
[DOI: 10.1080/10584580215526]

Hoffmann, M.
Leuerer, T.
Liedtke, R.
Böttger, Ulrich
Mokwa, Wilfried
et al.

[Fachzeitschriftenartikel]
PZT thin films for piezoelectric microactuator applications
In: Sensors and actuators / A, Physical, 97/98, 680-684, 2002
[DOI: 10.1016/S0924-4247(01)00850-0]

Küppers, H.
Leuerer, Timm
Schnakenberg, Uwe
Mokwa, Wilfried
Hoffmann, M.
et al.

[Fachzeitschriftenartikel]
Characterization of electroplated nickel
In: Microsystem technologies, 9 (1/2), 87-91, 2002
[DOI: 10.1007/s00542-002-0199-1]

Fritz, Thomas Michael (Corresponding author)
Cho, H. S.
Hemker, K. J.
Mokwa, Wilfried
Schnakenberg, Uwe

[Fachzeitschriftenartikel]
Capacitive pressure sensor with monolithically integrated CMOS readout circuit for high temperature applications
In: Sensors and actuators / A, Physical, 97/98, 83-87, 2002
[DOI: 10.1016/S0924-4247(01)00799-3]

Kasten, Klaus
Kordas, Norbert
Kappert, Holger
Mokwa, Wilfried

[Fachzeitschriftenartikel]
Transponder system for non-invasive measurement of intravascular pressure
In: Biomedizinische Technik = Biomedical engineering, 47 (Suppl. 1,1), 191-193, 2002
[DOI: 10.1515/bmte.2002.47.s1a.191]

Schnakenberg, Uwe
Krüger, Clemens
Pfeffer, J. G.
Mokwa, Wilfried
vom Bögel, G.
et al.

[Buchbeitrag, Beitrag zu einem Tagungsband]
High temperature pressure sensor with monolithically integrated CMOS readout circuit based on SIMOX technology
In: Transducers '01/Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10 - 14, 2001, Munich, Germany. [Ernst Obermeier, general chairman], 510-513, 2001

Kasten, K.
Kordas, N.
Kappert, H.
Mokwa, Wilfried

[Buchbeitrag, Beitrag zu einem Tagungsband]
A foldable artificial lens with an integrated transponder system for measuring intraocular pressure
In: Transducers '01/Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10 - 14, 2001, Munich, Germany. [Ernst Obermeier, general chairman], 1224-1227, 2001

Ullerich, S.
Mokwa, Wilfried
vom Bogel, G.
Schnakenberg, Uwe

[Fachzeitschriftenartikel]
Material characterisation of electroplated nickel structures for microsystem technology
In: Electrochimica acta, 47 (1/2), 55-60, 2001
[DOI: 10.1016/S0013-4686(01)00576-X]

Fritz, Thomas Michael
Mokwa, Wilfried
Schnakenberg, Uwe

[Fachzeitschriftenartikel]
Micro-transponder systems for medical applications
In: IEEE transactions on instrumentation and measurement : IM, 50 (6), 1551-1555, 2001
[DOI: 10.1109/19.982943]

Mokwa, Wilfried
Schnakenberg, Uwe

[Buchbeitrag, Beitrag zu einem Tagungsband]
PZT thin films for piezoelectric micro-actuator applications
In: Transducers '01/Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10 - 14, 2001, Munich, Germany. [Ernst Obermeier, general chairman]. - Vol. 2: Sessions 3A1 - 4D3. Papers 3A1.01 - 4D3.16P, 1018-1021, 2001

Küppers, Hartmut Paul
Leuerer, Timm
Schnakenberg, Uwe
Mokwa, Wilfried
Hoffmann, M.
et al.

[Buchbeitrag, Beitrag zu einem Tagungsband]
A new concept and first development results of a PZT thin film actuator
In: Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics, ISAF 2000 : Honolulu, Hawaii, U.S.A., July 21 - August 2, 2000 / Institute of Electrical and Electronics Engineers, Ultrasonics, Ferroelectrics, and Frequency Control Society. Ed.: S. K. Streiffer ... - Vol. 1, 512-524, 2001
[DOI: 10.1109/ISAF.2000.941612]

Hoffmann, Marcus
Küppers, Hartmut Paul
Schneller, Theodor
Böttger, Ulrich
Schnakenberg, Uwe
et al.

[Fachzeitschriftenartikel]
Basic investigations on a piezoelectric bending actuator for micro-electro-mechanical applications
In: Integrated ferroelectrics, 35 (1/4), 269-281, 2001
[DOI: 10.1080/10584580108016908]

Küppers, H.
Hoffmann, M.
Leuerer, Timm
Schneller, Theodor
Böttger, Ulrich
et al.

[Buchbeitrag, Beitrag zu einem Tagungsband]
Micro coils for an advanced system for measuring intraocular pressure
In: Proceedings / 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology : October 12 - 14, 2000, Palais des Congrès, Lyon, France / co-ed.: André Dittmar ..., 470-474, 2000
[DOI: 10.1109/MMB.2000.893828]

Ullerich, S.
Mokwa, Wilfried
vom Bogel, G.
Schnakenberg, Uwe

[Buchbeitrag, Beitrag zu einem Tagungsband]
Mechanical properties of electroplated nickel
In: Proceedings / 3. International Conference and Poster Exhibition Micro Materials, MicroMat 2000, April 17 - 19, 2000, Berlin, Germany / organizers: IZM, Fraunhofer Institute for Reliabilty and Microintegration, Berlin ... Eds.: B. Michel ..., 752-755, 2000

Fritz, T.
Leuerer, T.
Krüger, C.
Mokwa, Wilfried
Schnakenberg, Uwe

[Buchbeitrag, Beitrag zu einem Tagungsband]
Design optimization for electroplated micro-springs
In: Proceedings / 3. International Conference and Poster Exhibition Micro Materials, MicroMat 2000, April 17 - 19, 2000, Berlin, Germany / organizers: IZM, Fraunhofer Institute for Reliabilty and Microintegration, Berlin ... Eds.: B. Michel ..., 767-770, 2000

Leuerer, T.
Krüger, C.
Fritz, T.
Mokwa, Wilfried
Schnakenberg, Uwe

[Buchbeitrag, Beitrag zu einem Tagungsband]
Artificial nerve connection: an interface for controlling prosthesis and organ functions
In: Proceedings of the Fourth International Symposium on Tissue Engineering for Therapeutic Use, Kyoto, Japan, 23-24th September 1999. Elsevier 2000. - 4, 153-160, 2000

Richter, H.
Schnakenberg, Uwe
Ziegmann, C.