フェムト秒レーザー加工による3次元高分子マイクロ・ナノ構造の熱特性

• Thermal Proberty of 3D polymeric micro- ans nanostructures intergrated on a temperature sensor for µ-TWA using a FS laser structuring

Nakagawa, Shiori; Ryu, Meguya; Jiang, Felix; Mizeikis, Vygantas; Morikawa, Junko

(2022)
Contribution to a conference proceedings

In: [The 43rd Japan Symposium on Thermophysical Properties, 2022-10-25 - 2022-10-27, Wakayama, Japan]

Institutions

• Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]