In-plane Thermal Diffusivity Measurement of a Suspended SiNx Membrane by Temperature Wave Analysis

Jiang, Felix; Ryu, Meguya; Ingebrandt, Sven; Vu, Xuan Thang; Morikawa, Junko

Contribution to a conference proceedings

In: [The 70th JSAP Spring Meeting 2023, JSAP Spring 2023, 2023-03-15 - 2023-03-18, Tokyo, Japan]


  • Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]