In-plane thermal diffusivity measurement of polymeric thin films by temperature wave analaysis on a suspended SiNx membrane

Jiang, Felix; Ryu, Meguya; Ingebrandt, Sven; Vu, Xuan Thang; Morikawa, Junko

(2022)
Contribution to a conference proceedings

In: [The 43rd Japan Symposium on Thermophysical Properties, 2022-10-25 - 2022-10-27, Wakayama, Japan]

Institutions

• Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]