In-plane thermal diffusivity measurement of Parylene C thin films by temperature wave analysis with an RTD sensor array on a suspended SiNx thin film

Jiang, Felix; Schaller, Laura; Ryu, Meguya; Morikawa, Junko; Ingebrandt, Sven; Vu, Xuan Thang

Contribution to a conference proceedings

In: [(VIACTA2022)-9th International and 11th Japan — China Joint Symposium on Calorimetry and Thermal Analysis (CATS-2022), VIACTA2022, 2022-10-25 - 2022-10-26, Tokyo, Japan]


  • Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]