RTD sensor array on a suspended SiNx membrane to measure heat transfer in thin films

Jiang, Felix; Vu, Xuan Thang; Ryu, Meguya; Ingebrandt, Sven; Morikawa, Junko

Contribution to a conference proceedings

In: [(VIACTA2022)-9th International and 11th Japan — China Joint Symposium on Calorimetry and Thermal Analysis (CATS-2022), VIACTA2022, 2022-10-25 - 2022-10-26, Tokyo, Japan]


  • Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]