Apparent thermal diffusivity of heat guiding photoresist microstructures on a suspended SiNx membrane

Jiang, Felix; Ryu, Meguya; Ingebrandt, Sven; Vu, Xuan Thang; Morikawa, Junko

Contribution to a conference proceedings

In: [The 58th Japanese Conference on Calorimetry and Thermal Analysis, 58TOURON, 2022-10-26 - 2022-10-28, Tokyo, Japan]


  • Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]