Hermeticity of SI1-XGEX Diaphragms for the Fabrication of a Capacitive Post-Cmos Pressure Sensor

Walk, Christian (Corresponding author); Netaev, Alexander; Wiemann, Matthias; Gortz, Michael; Vogt, Holger; Mokwa, Wilfried; Seidl, Karsten

Piscataway, NJ : IEEE (2019)
Contribution to a book, Contribution to a conference proceedings

In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (Transducers & Eurosensors XXXIII) / Transducers 2019 & Eurosensors XXXIII, Berlin, Germany, 23-27 June ; conference chair: Christofer Hierold (ETH Zürich, Switzerland) ; technical program chair: Jürgen Brugger (EPFL, Switzerland) ; sponsored by: Hahn Schickard, IEEE, Electron Devices Society
Page(s)/Article-Nr.: 1862-1865

Institutions

• Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]