Scalable fabrication and application of nanoscale IDE-arrays as multi-electrode platform for label-free biosensing

Delle, L. E.; Pachauri, V.; Vlandas, A.; Riedel, M.; L├Ągel, B.; Lilischkis, R.; Vu, Xuan Thang; Wagner, P.; Thoelen, R.; Lisdat, F.; Ingebrandt, Sven (Corresponding author)

Amsterdam [u.a.] : Elsevier Science (2018)
Journal Article

In: Sensors and actuators / B
Volume: 265
Page(s)/Article-Nr.: 115-125


  • Department of Physics [130000]
  • Chair of Experimental Physics I A and I. Institute of Physics [131110]
  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]