Six-layer lamination of a new dry film negative-tone photoresist for fabricating complex 3D microfluidic devices

El Hasni, Akram (Corresponding author); Pfirrmann, Stefan; Kolander, Anett; Yacoub-George, Erwin; König, Martin; Landesberger, Christof; Voigt, Anja; Grützner, Gabi; Schnakenberg, Uwe

Heidelberg : Springer (2017)
Journal Article

In: Microfluidics and nanofluidics
Volume: 21
Page(s)/Article-Nr.: 41

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]