Studies on thinned flexible integrated capacitive pressure sensors in tactile sensor arrays for the use in robotics and prosthetics
Müntjes, Jutta A. (Corresponding author); Häfner, Joachim; Görtz, Michael; Mokwa, Wilfried
Piscataway, NJ : IEEE (2013)
Contribution to a book, Contribution to a conference proceedings
In: 2013 Transducers & Eurosensors XXVII : the 17th International Conference on Solid-State Sensors, Actuators and Microsystems ; Barcelona, Spain, 16 - 20 June 2013 / [IEEE Electron Devices Society]
Page(s)/Article-Nr.: 1460-1463
Institutions
- Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
Identifier
- DOI: 10.1109/Transducers.2013.6627055
- RWTH PUBLICATIONS: RWTH-CONV-203453