Studies on thinned flexible integrated capacitive pressure sensors in tactile sensor arrays for the use in robotics and prosthetics

Müntjes, Jutta A. (Corresponding author); Häfner, Joachim; Görtz, Michael; Mokwa, Wilfried

Piscataway, NJ : IEEE (2013)
Contribution to a book, Contribution to a conference proceedings

In: 2013 Transducers & Eurosensors XXVII : the 17th International Conference on Solid-State Sensors, Actuators and Microsystems ; Barcelona, Spain, 16 - 20 June 2013 / [IEEE Electron Devices Society]
Page(s)/Article-Nr.: 1460-1463


  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]