Concept of the PaTra - particle transporter with Simulated Particle movement

Rockenbach, Alexander; Brücker, Christoph; Schnakenberg, Uwe

Berlin [u.a.] : VDE-Verl. (2012)
Contribution to a book, Contribution to a conference proceedings

In: Mikro-Nano-Integration : Beiträge des 4. GMM-Workshops 12. - 13. November 2012 in Berlin / Tagungsleiter: Martin Hoffmann. Veranstalter: VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem-und Feinwerktechnik (GMM)
Page(s)/Article-Nr.: 12 S.


  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]