Design optimization for electroplated micro-springs

Leuerer, T.; Kr├╝ger, C.; Fritz, T.; Mokwa, Wilfried; Schnakenberg, Uwe

Dresden : Verl. ddp Goldenbogen (2000)
Contribution to a book, Contribution to a conference proceedings

In: Proceedings / 3. International Conference and Poster Exhibition Micro Materials, MicroMat 2000, April 17 - 19, 2000, Berlin, Germany / organizers: IZM, Fraunhofer Institute for Reliabilty and Microintegration, Berlin ... Eds.: B. Michel ...
Page(s)/Article-Nr.: 767-770


  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]