Reactively sputtered iridium oxide - Influence of plasma excitation and substrate temperature on morphology, composition, and electrochemical characteristics

Wessling, Börge; Besmehn, Astrid; Mokwa, Wilfried; Schnakenberg, Uwe

Pennington, NJ : Electrochemical Society (2007)
Journal Article

In: Journal of the Electrochemical Society : JES
Volume: 154
Issue: 5
Page(s)/Article-Nr.: 83-89

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]