Production processes and applications for the passive alignment of microcomponents

Brecher, Christian; Lange, Sven Carsten; Peschke, Christian; Weinzierl, Martin; Spanier, G.; Mokwa, Wilfried

Berlin [u.a.] : Springer (2006)
Contribution to a conference proceedings, Journal Article

In: Microsystem technologies
Volume: 12
Issue: 5
Page(s)/Article-Nr.: 611-615

Institutions

• Fraunhofer Institute for Production Technology [053200]
• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]