Investigations on temperature controlled monolithic integrated surface acoustic wave (SAW) gas sensors

Bender, S.; Dickert, F. L.; Mokwa, Wilfried; Pachatz, P.

Amsterdam [u.a.] : Elsevier (2003)
Contribution to a conference proceedings, Journal Article

In: Sensors and actuators / B, Chemical
Volume: 93.2003
Issue: 1/3
Page(s)/Article-Nr.: 164-168

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]