Polysilicon sacrificial layer etching using ClF3 for thin film encapsulation of silicon acceleration sensors with high aspect ratio

Metzger, Lars; Fischer, Frank; Mokwa, Wilfried

Amsterdam [u.a.] : Elsevier (2007)
Journal Article

In: Sensors and actuators / A, Physical
Volume: 133
Issue: 1
Page(s)/Article-Nr.: 259-265

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]