Electrodeposition and properties of NiW films for MEMS application

Slavcheva, Evelina; Mokwa, Wilfried; Schnakenberg, Uwe

New York, NY [u.a.] : Elsevier (2005)
Journal Article

In: Electrochimica acta
Volume: 50
Issue: 28
Page(s)/Article-Nr.: 5573-5580

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]