Iridium oxide deposited by pulsed dc-sputtering for stimulation electrodes

van Ooyen, André; Topalov, Georgi; Ganske, Gerald; Mokwa, Wilfried; Schnakenberg, Uwe

Bristol : IOP Publ. (2009)
Journal Article

In: Journal of micromechanics and microengineering
Volume: 19
Issue: 7
Page(s)/Article-Nr.: 074009

Institutions

• Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]