High temperature pressure sensor with monolithically integrated CMOS readout circuit based on SIMOX technology

Kasten, K.; Kordas, N.; Kappert, H.; Mokwa, Wilfried

Berlin [u.a.] : Springer (2001)
Contribution to a book, Contribution to a conference proceedings

In: Transducers '01/Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10 - 14, 2001, Munich, Germany. [Ernst Obermeier, general chairman]
Page(s)/Article-Nr.: 510-513


  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]