PZT thin films for piezoelectric micro-actuator applications

Küppers, Hartmut Paul; Leuerer, Timm; Schnakenberg, Uwe; Mokwa, Wilfried; Hoffmann, M.; Schneller, Theodor; Böttger, Ulrich; Waser, Rainer

Berlin [u.a.] : Springer (2001)
Contribution to a book, Contribution to a conference proceedings

In: Transducers '01/Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10 - 14, 2001, Munich, Germany. [Ernst Obermeier, general chairman]. - Vol. 2: Sessions 3A1 - 4D3. Papers 3A1.01 - 4D3.16P
Page(s)/Article-Nr.: 1018-1021

Institutions

  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
  • Chair of Materials of Electrical Engineering II and Institute of Materials of Electrical Engineering [611610]

Identifier